@InProceedings{CapoteSánchezCapoCoraTrav:2022:InDePa,
               author = "Capote S{\'a}nchez, Ariel and Capote, Gil and Corat, Evaldo 
                         Jos{\'e} and Trava-Airoldi, Vladimir Jesus",
          affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)} and 
                         {Universidad Nacional de Colombia} and {Instituto Nacional de 
                         Pesquisas Espaciais (INPE)} and {Instituto Nacional de Pesquisas 
                         Espaciais (INPE)}",
                title = "Influence of the deposition parameters on the properties of a-C:H 
                         coatings deposited on AISI 316 using a modified pulsed-DC PECVD 
                         technique with an active screen as an additional cathode",
                 year = "2022",
         organization = "Brazil MRS Meeting, 20.",
             abstract = "Diamond-Like Carbon (DLC) coatings are widely used due to their 
                         attractive mechanical, chemical, tribological, and biological 
                         properties [1]. Some mechanical properties, such as modulus of 
                         elasticity and hardness could be modified by controlling the 
                         deposition parameters [2]. This modified pulsed-DC Plasma Enhanced 
                         Chemical Vapor Deposition (PECVD) technique has stood out in this 
                         field for making it possible to grow films at low pressures in a 
                         near collision-less regime leading to achieve improved mechanical 
                         and tribological properties [3]. In this work, DLC coatings were 
                         deposited on AISI 316 stainless steel via modified pulsed-DC PECVD 
                         technique with an additional cathode. The mechanical, 
                         tribological, microstructural properties and the adhesion of the 
                         film were studied as a function of the variation of the deposition 
                         parameters. The results showed that harder films were obtained, 
                         with lower wear rates and with low coefficient of friction for 
                         lower deposition pressures, reaching a maximum hardness up to 28 
                         GPa. Also, films with better structural quality and better 
                         adhesion to the substrate were obtained for lower bias- voltages. 
                         Therefore, the tribological and mechanical properties and film''s 
                         microstructural quality were strongly dependent on the internal 
                         pressure, applied bias-voltage, and the power supply duty cycle. 
                         In addition, the use of the modified pulsed-DC PECVD with an 
                         active screen allowed the obtainment of films with excellent 
                         properties, making it possible to expand their applicability for 
                         mechanical and tribological applications.",
  conference-location = "Foz do Igua{\c{c}}u, PR",
      conference-year = "25-29 set. 2022",
           targetfile = "4FKM.pdf",
        urlaccessdate = "2024, Apr. 25"
}